ACM Research, a two-year-old Californian company, says it can see the end of the road for chemical mechanical polishing (CMP), and is looking to move in on the market with a non-contact process. It ...

Chipmakers are relying on machine learning for electroplating and wafer cleaning at leading-edge process nodes, augmenting traditional fault detection/classification and statistical process control in ...

The semiconductor industry is constantly marching toward thinner films and complex geometries with smaller dimensions, as well as newer materials. The number of chemical mechanical planarization (CMP) ...

CMP is an integral part of the semiconductor chip manufacturing process enhancement process. Since the concept of CMP polishing applications was introduced by Walsh et al. in 1965, CMP process ...

Effective fabrication of complex, high performance semiconductor devices is highly dependent on the use of chemical mechanical planarization (CMP). This process is used to planarize the wafer surface ...

CHANDLER, Ariz.– SpeedFam-IPEC Inc. today rolled out a suite of CMP processes for its universal tool in chemical mechanical planarization, which is called Momentum. The new processes of record cover 0 ...